Measurement Technology for Micro-Nanometer Devices
Wendong Zhang
- 18 oktober 2016
- 9781118717998
Samenvatting:
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
€ 128,99
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