Fundamentals of Semiconductor Fabrication

Gary S. May

• 28 augustus 2007
• 9780471232797

Samenvatting:

From crystal growth to integrated devices and circuits, this new book offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.

This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film deposition.

• The book integrates Computer Modeling & Simulation tools throughout.
• Process simulation is used as a tool for what-if analysis and discussion.
• Comprehensive coverage of process sequences helps readers connect individual steps into a cohesive whole.

Fundamentals of Semiconductor Fabrication provides an introduction to semiconductor fabrication technology, from crystal growth to integrated devices and circuits. It includes theoretical and practical aspects of all major fabrication steps, making it a useful reference tool when students enter the semiconductor industry. Each chapter begins with an introduction and a list of learning goals, and each chapter ends with a summary of important concepts and suggested homework problems.